DPE (LOW-NOISE) 低訊號噪音探針
Typical radius of uncoated tip : 8 nm
Resulting tip radius with the coating : < 40 nm
Full tip cone angle* : 40°
Total tip height : 12 - 18 µm
Probe material : n-type silicon
Tip coating : Platinum
Detector coating : Platinum
The DPE probe consists of a silicon tip and a special structure of conductive layers, which provides a more stable electrical signal and less noise. Because of the increase in tip radius, some reduction of resolution in the topography image is possible when using DPE probes in comparison with bare silicon probes due to the increased tip radius.
DPE probes have increased coating thickness, which gives more freedom for using them in contact electrical modes. The probes provide better performance and higher contrast of electrical signals, while the ability to resolve the small surface details might be reduced. The probes can be used in electric AC modes when a study of the electric properties of a sample has higher priority. This is demonstrated in AM-FM images of a fluoroalkane layer.